Applied SunFab Service

Applied SunFab Performance Service is the industry’s first and only comprehensive integrated engineering support solution for solar applications that maximizes fab performance and guarantees cost, enabling the fastest path to maximum megawatt (MW) output and lowest cost per watt. Building on extensive equipment service experience, this complete package includes equipment and fab optimization, certified maintenance and repair, complete parts management, and advanced cleaning and kitting services of process critical components. By offering predictable factory support costs with continuous performance improvements, SunFab Performance Service enables fast return on investment while minimizing risks to manufacturers by eliminating start-up infrastructure costs such as building spare parts inventory as well as hiring and training engineering resources.

Applied SunFab Performance Service guarantees cost and provides continuous improvements in MW output

• Ensures maximum fab productivity through 24x7 real-time monitoring and support for the line and subfab
• Enables lowest overall cost of ownership with predictable fab support cost
• Minimizes risks associated with starting and operating a fab
• Eliminates infrastructure build-up costs
• Provides continuous reduction in operating costs over the life of the factory

Leveraging over 20 years of proven mission-critical performance in leading semiconductor and flat panel fabs, Applied SunFab automation software provides a complete integrated automation solution to shorten ramp time to volume production and ensure optimum fab performance. Real-time equipment performance tracking and control enable fast problem resolution and predictability to improve utilization.

• Optimizes fab productivity and efficiency
• Shortens ramp time to volume production
• Improves equipment uptime with fast problem resolution and predictability

Applied SunFab Abatement is the production tool of record (PTOR) for Applied Materials’ SunFab thin film manufacturing line, providing customers with an integrated, cost-efficient process and subfab exhaust solution. As a key component of the SunFab line, this system provides over 99% abatement efficiency for SiH4, F2, NF3, and SiF4. Its ability to remove >99% of the hydrogen fluoride produced during the abatement process at the point of use prevents potential corrosion of facilities ductwork and overloading of the house scrubber. In addition, SunFab Abatement features advanced wet scrubber technology that ensures superior particulate management, >52% improvement by weight over burn/trap technology, for extended preventative maintenance cycles.

• High reliability, low installation costs, and low COO drive down cost-per-watt
• Safe removal of flammable gases without high, costly dilution flows
• Environment regulatory compliance via high abatement efficiencies of typical CVD process gases for solar thin film applications
• Superior particle and thermal management enables extended PM cycles
• Packaged with the Applied SunFab thin film manufacturing for integrated, cost-efficient process and subfab exhaust solution